ACTINIC EUV PHOTOMASK
Actinic EUV photomask inspection
Actinic EUV photomask inspection
Named ACTIS product family
AI & HPC · Data Center · Consumer Electronics
Public source
ACTIS is a publicly named Lasertec actinic EUV mask inspection family, including the ACTIS A300 product page.
Silicon Showcase illustrative visual
Illustrative representation based on publicly available technical information.
Lasertec ACTIS is an actinic EUV photomask inspection platform for high-volume EUV mask qualification.
Official Lasertec pages present ACTIS as inspection of EUV masks at actinic wavelength. This listing records the ACTIS platform rather than every inspection tool Lasertec sells. Configuration details should be confirmed on Lasertec’s current ACTIS pages.
Key characteristics associated with this technology.
Actinic EUV photomask inspection
Named ACTIS product family
Mask qualification rather than wafer defect inspection
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